Utilizing a powerful combination of high resolution
digital CCD camera and pattern recognition
software, a fully automated pattern recognition
and alignment is made possible for user applications.

The NX-HDM is equipped with automated software
that makes operation nearly effortless. Just select
the desired measurement program to get precise
multi-site analysis with optimized setting for
cantilever tuning, scan rate, gain, and set point
parameters as a recipe.

Park's user-friendly software interface gives you
the flexibility to create customized operation
routines (recipes) so you can access the full power
of the NX-HDM and get the measurements you need.

Creating new recipes is easy. It takes about 10
minutes to create a new routine from scratch, or
less than 5 minutes to modify an existing one.

Park NX-HDM provides these:

• Auto, semi-auto, and manual mode so you have complete control
• Editable measurement method for each automated routine
• Live monitoring of the measurement process
• Automatic analysis of acquired measurement data

The XY scanner consists of symmetrical 2-dimensional flexure and high-force piezoelectric
stacks that provide high orthogonal movement
with minimal out-of-plane motion as well as the
high responsiveness essential for precise sample
scanning in the nanometer scale.

Two symmetric, low-noise position sensors are
incorporated on each axis of the XY scanner to
retain high scan orthogonality for the largest
scan ranges and sample sizes. The secondary
sensor corrects and compensates for non-linear
and non-planar positional errors caused by a
single sensor alone.

Driven by a high-force piezoelectric stack and
guided by a flexure structure, the standard Z
scanner has a high resonant frequency of more
than 9 kHz (typically 10.5 kHz) and Z-servo speed
of more than 48 mm/sec tip velocity which enables
accurate feedback. The maximum Z scan range
can be extended from 15um to 40um with the
optional long scan range Z scanner.

The industry leading low noise Z detector replaces
the applied Z voltage as the Topography signal. In
addition, the low noise XY closed loop scan
minimizes the forward and backward scan gap to
be less than 0.15% of the scan range.

To detect the smallest sample features, and image
the flattest surfaces, Park has engineered the
industry’s lowest noise floor specification of < 0.5
Å. The noise floor data is determined using a “zero
scan.” The system noise is measured with the
cantilever in contact with the sample surface at a
single point under the following conditions :

• 0 nm x 0 nm scan, staying at one point.
• 0.5 gain in contact mode
• 256 x 256 pixels