Park NX20 300mm

The leading automated
nanometrology tool

XY Stage

300 mm x 300 mm
(Motorized)

Sample size

100, 150, 200, 300 mm wafers,
thickness up to 20 mm

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Overview
Tech
AFM Modes

The leading automated
nanometrology tool for
300 mm wafer
measurement and
analysis

The Park NX20 300mm is the industry's first large
sample AFM that supports a full motorized traveling
range of 300 mm x 300 mm.
Designed for failure analysis and quality control
laboratories, the new upgraded Park NX20 system
can inspect an entire 300 mm wafer efficiently,
without any need for cumbersome sample
displacement. Despite the enlarged platform to
support the 300 mm motorized XY stage, Park's
innovative vibration isolation technology keeps the
system noise level below 0.5 angstrom (Å) RMS or
typically 0.3 Å RMS in the field.

Proven AFM performance and SingleClick-AFM
automation eliminates any need for sample
adjustment and makes of Park NX20 the scanning
process as efficient and user-friendly as possible.
With our "Program Mode" interface users can easily
implement reliable and repeatable sequential
multiple-site measurements over the entire 300mm
x 300mm area. This makes the NX20 300 mm the
premiere choice for FA, QA, and QC engineers that
need to scan large samples.

Specifically Built for
Large Sample Wafer
Inspection

The NX20 300 mm was designed from the ground
up to allow for optimal measurements of large
samples. The entire 300 mm wafer area can be
analyzed for low-noise AFM measurements.
This opens up a whole new scope of measurement
automation, allowing engineers to work faster, more
simply, and with greater precision.

Flexible 300 mm Sample Chuck

The Park NX20 300 mm’s vacuum chuck supports a
wide range of wafer sizes, shapes, and types
allowing users to accurately scan practically any sample.

300 mm XY stage

The motorized 300 mm XY stage allows users to
move the AFM measuring position within the
entire 300 mm area.

Proven NX20
Performance with
a 300 mm sample stage

The NX20 is already the best choice for FA, QA, and
QC engineers that need its unparalleled ease of use
and automation without compromising on accuracy.
With its enlarged platform that supports a 300mm
motorized XY stage, the NX20 300 mm takes this a
step further, allowing users to inspect larger samples
easily and with extremely high accuracy.

Park SmartScan™ makes
getting accurate
measurements simple

The Park NX20 is equipped with our SmartScan OS,
making it one of the easiest to use AFMs on the
market. With an intuitive but extremely powerful
interface, even untrained users can quickly scan
a large sample without supervision. This lets senior
engineers focus their experience on solving bigger
problems and developing better solutions.

Scan multiple sites on the entire
300 mm wafer

SmartScan’s program mode allows users to take
automated sequential site measurements,
compare surface morphologies, height, surface
roughness from site-to-site and sample-to-sample
using grid and wafer based modes. This can
greatly improve user-convenience and productivity
when scanning large samples.

Powerful recipe creation

Our simple recipe creation process allows
engineers to set presets defined by location, name,
number and type on each batch.

Optimized for a Wide
Range of Applications

The NX20 300mm provides recipe-automated AFM
measurement for numerous applications providing
advanced measurements and analysis of samples at
the nanoscale. With the ability to measure
roughness, height and depth, perform defect
reviews, electrical and magnetic failure analyses,
thermal property characterization,
and nanomechanical property imaging, the AFM is
ideally suited to a wide range of tasks performed by
FA, QA, and QC engineers that work with large samples.

Park AFM Modes

Park Advanced AFM Modes

Park AFMs feature a comprehensive range of scanning modes so you can collect a wide array of data types accurately and efficiently. From the world’s only True Non-Contact™ Mode that preserves tip sharpness and sample integrity to advanced Magnetic Force Microscopy, Park offers the most innovative, accurate modes in the AFM industry.

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