Park XE15

Power and versatility,
brilliantly combined

XY Stage

150 mm X 150 mm (Motorized)
200 mm x 200 mm (Motorized)

Sample size

50, 100, 150 mm wafers
Coupon sample using Magnetic Sample Holder (thickness up to 20 mm)
50, 100, 150, 200 mm wafers (Optional)

Increase your
productivity with our
powerfully versatile
atomic force microscope

The Park XE15 includes many unique capabilities that
make it ideal for shared labs that handle a diverse
range of samples, researchers doing multi variant
experiments, and failure analysis engineers working
on wafers. Its reasonable price and robust feature
set also make it one of the best value large-sample
AFMs in the industry.

The Most Convenient Sample
Measurements with MultiSample

  • Automated imaging of multiple samples in one pass
  • Specially designed multi-sample chuck for the loading of up to 16 individual samples
  • Fully motorized XY sample stage travels up to 150 mm x 150 mm

Accurate XY Scan by Crosstalk

  • Two independent, closed-loop XY and Z flexure scanners
  • Flat and orthogonal XY scan with low residual bow
  • Accurate height measurements without any need for software processing

Best Tip Life, Resolution and Sample
Preservation by True Non-Contact™

  • Fast Z-servo speed enabling True Non-Contact™ Mode
  • Minimum tip wear for prolonged high-quality and high-resolution imaging

Versatile Range of Modes and Options

  • Comprehensive set of measurement modes and characterizations
  • Expanded capabilities with optional accessories and upgrades
  • Advanced electrical measurements for failure analysis (FA)

The most convenient sample measurements with MultiSample™ scan

Park XE15 MultiSample™
scan system

  • Automated imaging of multiple samples in one pass
  • Specially designed multi-sample chuck for the loading of up to 16 individual samples
  • Fully motorized XY sample stage travels up to 150 mm x 150 mm

Using the motorized sample stage, MultiSample Scan™ enables programmable multiple region imaging in step-and-scan automation.

Here’s how it works :

  • Register multiple scan positions defined by a
  • Image from the first scan position
  • Lift a cantilever
  • Move the motorized stage to the next user defined coordinate
  • Approach
  • Repeat scan

The registration of multiple scan positions is easily
carried out by either entering sample-stage
coordinates or sample de-skewing by two
reference points. This automated feature greatly
increases productivity by reducing the need for
your interaction during the scan process.

Flat Orthogonal XY
Scanning without
Scanner Bow

Park's Crosstalk Elimination scanner structure
removes scanner bow, allowing flat orthogonal XY
scanning regardless of scan location, scan rate, and
scan size. It shows no background curvature even on
flattest samples, such as an optical flat, and with
various scan offsets. This provides you with a very
accurate height measurement and precision
nanometrology for the most challenging problems in research and engineering.

Decoupled XY and Z Scanners

The fundamental difference between Park and its
closest competitor is in the scanner architecture.
Park’s unique flexure based independent XY
scanner and Z scanner design allows unmatched
data accuracy in nano resolution in the industry.

Unprocessed raw data

Accurate Surface Measurement
"Flat" sample surface as it is!

  • Low residual bow
  • No need for software processing
  • Accurate results independent of scan location

Better tip life,
sample preservation,
and accuracy with
True Non-Contact™ Mode

In True Non-Contact™ Mode, the tip-sample distance is successfully maintained at a few nanometers in the net attractive regime of inter-atomic force. The small amplitude of tip oscillation minimizes the tip-sample interaction, resulting in superb tip preservation and negligible sample modification.

  • Less tip wear = Prolonged high-resolution scan
  • Non-destructive tip-sample interaction =
    Minimized sample modification
  • Immunity from parameter dependent results
  • Quick tip wear = Blurred low-resolution scan
  • Destructive tip-sample interaction = Sample damage and modification
  • Highly parameter-dependent

Longer Tip Life and Less Sample

The sharp end of an AFM tip is so brittle that once
it touches a sample, it becomes instantly blunt and
limits the resolution of an AFM and reduces the
quality of the image. For softer samples, the tip will
damage the sample and also result in inaccuracies
of sample height measurements. Consequently,
preserving tip integrity enables consistent high
resolution and accurate data.
True Non-Contact™ Mode of the XE-AFM superbly
preserves the tip, resulting in a much longer tip life
and less sample damage. The figure, displayed in
1:1 aspect ratio, shows the unprocessed raw data
image of a shallow trench isolation sample imaged
by the XE-AFM, whose depth is also confirmed by
scanning electron microscope (SEM). The same tip
used in the imaging of the sample shows no tip wear even after taking 20 images.

Park AFM Modes

Park Advanced AFM Modes

Park AFMs feature a comprehensive range of scanning modes so you can collect a wide array of data types accurately and efficiently. From the world’s only True Non-Contact™ Mode that preserves tip sharpness and sample integrity to advanced Magnetic Force Microscopy, Park offers the most innovative, accurate modes in the AFM industry.