Fully Automated AFM solution for
ultra large and heavy samples

Scan range

XY Scan Range: 100X100 µm,
Z Scan Range: 15 µm

The automated Atomic
Force Microscopy (AFM)
system for ultra large
and heavy flat panel
displays at nanoscale

As the demand for Atomic Force Metrology for larger
flat panel displays increases, Park NX-Tip Scan Head
overcomes nanometrology challenges for samples
over 300mm. The Tip Scanning Head and gantry
style air-bearing stage allows Park NX-TSH to
accurately image roughness measurement, step
height measurement, critical dimension
Atomic force microscopy is the most accurate, and
non-destructive, method of measuring samples at
nanoscale and with Park NX-TSH, reliable, high
resolution AFM images can be obtained on OLEDs, LCDs, photomasks and more.

Designed for OLED, LCD and other
large sample analysis

  • Park Systems has scaled up its AFM tools for Gen8+ and all large flat panel displays with the Park NX-TSH (Tip Scanning Head) system
  • Park NX-TSH is designed for large and heavy flat
    panel display glass and 2D encoders, with
    intergrated micro probe stations for conductive
    AFM and electric defect analysis
  • Park NX-TSH can scan up to 100 μm x 100 μm (x-y direction) and 15 μm (z direction)
  • Park NX-TSH has a flexible chuck to accommodate
    large and heavy samples bigger than 300 mm
    engineered for OLED, LCD and other large sample analysis
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The fully Automated Tip
Scanning Head for OLED,
LCD, and 2D encoder sample

Developed specifically for
manufacturers setting up fabs
to produce next-generation
flat panel displays

Park Systems has scaled up their AFM tools for
Gen8+ and all large flat panel displays using Park NX-TSH (Tip Scanning Head) system, and is the fully
automated Tip Scan Head for large sample analysis.
It was developed specifically for manufacturers
setting up fabs to produce next-generation flat panel
displays with the objective to overcome the 300mm size threshold limit.

Changes in the silicon wafer diameter

Using conductive AFM, Park NX-TSH can measure
the sample surface with optional probe stations
that contact the sample surface and provide
current into small devices or chips of wafer level.
Park NX-TSH is for a 2D encoder sample with
conductive AFM for electric defect analysis by
integrating micro probe stations.

Park NX-TSH features

The newly developed Tip Scanning Head by Park
Systems combines X, Y and Z scanners, moving
directly to the desired point. Park NX-TSH can scan
tip itself in X, Y and Z directions, up to 100 µm x
100 μm (x-y direction) and 15 μm Z-direction, and
has a flexible chuck to accommodate large and
heavy samples over 300mm developed for OLED,
LCD for large sample analysis. The sample is fixed
on a sample chuck and the tip scanning head
attached to the gantry moves to measurement
positions on the surface sample. The Park NX-TSH
tip scanning head system therefore overcomes the
limitations of sample size and weight since the
sample is fixed on the sample chuck.

The XY scanner consists of symmetrical 2-dimensional flexure and high-force piezoelectric
stacks that provide highly orthogonal movement
with minimal out-of-plane motion, as well as the
high responsiveness essential for precise sample
scanning at the nanometer scale.

The NX-TSH provides you with unprecedented
accuracy in topography height measurement by
utilizing its ultra-low noise Z detector instead of the
commonly used Z voltage signal that is non-linear
in nature. This industry leading low noise Z
detector replaces the applied Z voltage as the
topography signal.

Park NX-TSH overcomes nano metrology
challenges of large and heavy samples with a Tip
Scanning Head and a gantry style air-bearing stage
and produces high resolution images.
The air bearing stage technology provides faster
access and a fully automated system, improving productivity.

The NX-TSH is equipped with automated software
that makes operation nearly effortless. Just select
the desired measurement program to get precise
multi-site analysis with optimized settings for
cantilever tuning, scan rate, gain, and set point parameters.

Park's user-friendly software interface gives you
the flexibility to create customized operation
routines so you can access the full power of the
NX-TSH and get the measurements you need.

Creating new routines is easy. It takes about 10
minutes to make one from scratch, or less than 5
minutes to modify an existing one.

  • Auto, semi-auto, and manual mode so you have complete control
  • Editable measurement method for each automated routine
  • Live monitoring of the measurement process
  • Automatic analysis of acquired measurement data

Productivity meets

Automatic Tip Exchange (ATX)

The ATX automatically locates tips by pattern
recognition and uses a novel magnetic approach to
disengage a used tip and pick up a new tip, with an
incredible 99.9% success rate. The laser spot is
then automatically optimized along the X- and Y-axis by motorized positioning knobs.

Ionization System for a more stable scanning environment

Our innovative ionization system quickly and
effectively removes electrostatic charges in your
sample's environment. Since the system
always generates and maintains the ideal balance
of positive and negative ions, it can create an
extremely stable charge environment with little
contamination of the surrounding area and
minimal risk of accidental electrostatic charge
during sample handling.